Details zur Publikation

Kategorie Textpublikation
Referenztyp Zeitschriften
DOI 10.1063/5.0162597
Lizenz creative commons licence
Titel (primär) Roadmap for focused ion beam technologies
Autor Höflich, K.; Hobler, G.; Allen, F.I.; Wirtz, T.; Rius, G.; McElwee-White, L.; Krasheninnikov, A.V.; Schmidt, M.; Utke, I.; Klingner, N.; Osenberg, M.; Córdoba, R.; Djurabekova, F.; Manke, I.; Moll, P.J.W.; Manoccio, M.; De Teresa, J.M.; Bischoff, L.; Michler, J.; De Castro, O.; Delobbe, A.; Dunne, P.; Dobrovolskiy, O.V.; Frese, N.; Gölzhäuser, A.; Mazarov, P.; Koelle, D.; Möller, W.; Pérez-Murano, F.; Philipp, P.; Vollnhals, F.; Hlawacek, G.
Quelle Applied Physics Reviews
Erscheinungsjahr 2023
Department ISOBIO
Band/Volume 10
Heft 4
Seite von art. 041311
Sprache englisch
Topic T7 Bioeconomy
UFZ Querschnittsthemen ProVIS;
Abstract The focused ion beam (FIB) is a powerful tool for the fabrication, modification and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques and applications. By viewing FIB developments through the lens of the various research communities, we aim to identify future pathways for ion source and instrumentation development as well as emerging applications, and the scope for improved understanding of the complex interplay of ion-solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interests and will support future fruitful interactions connecting tool development, experiment and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.
dauerhafte UFZ-Verlinkung
Höflich, K., Hobler, G., Allen, F.I., Wirtz, T., Rius, G., McElwee-White, L., Krasheninnikov, A.V., Schmidt, M., Utke, I., Klingner, N., Osenberg, M., Córdoba, R., Djurabekova, F., Manke, I., Moll, P.J.W., Manoccio, M., De Teresa, J.M., Bischoff, L., Michler, J., De Castro, O., Delobbe, A., Dunne, P., Dobrovolskiy, O.V., Frese, N., Gölzhäuser, A., Mazarov, P., Koelle, D., Möller, W., Pérez-Murano, F., Philipp, P., Vollnhals, F., Hlawacek, G. (2023):
Roadmap for focused ion beam technologies
Appl. Phys. Rev. 10 (4), art. 041311 10.1063/5.0162597